All Entries Tagged With: "X-Ray Lithography"

The first MEMS micro motor experiment in Thailand (Pittaya Deekla SUT-SLRI on 07-Nov-2009)

This video shows the first micro motor experiment in Thailand performed on Saturday 7 th November 2009. This electrostatically driven micro motor had a rotor with a diameter of 0.88 millimeters. It consisted of 8 poles driven by 12 stator poles. It was fabricated by synchrotron x-ray lithography technique at micromachining lab, the Synchrotron Light [...]