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Thermal Actuation for Precision Micro Motion and Positioning

Demonstrator of a MEMS thermal actuator for improving the tracking accuracy of a hard disk drive head. This micro system was develop at the Delft University of Technology, in cooperation with DIMES (Delft Institute of Microsystems and Nanoelectronics), as part of the STW project 07213 ‘Advanced silicon micromachining for integrated 3D mechatronic microsystems’. Duration : […]