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SDA Movie

Movement of an untethered Scratch Drive Actuator measuring approximately 60 micrometers long by 120 micrometers wide by 1.5 micrometers thick, driven by a 100 Hz waveform. Duration : 0:9:18

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An Untethered, Globally Controllable MEMS Micro-robot

We present a steerable, electrostatic, untethered, MEMS micro-robot, with dimensions of 60 µm by 250 µm by 10 µm. This micro-robot is 1 to 2 orders of magnitude smaller in size than previous micro-robotic systems. The device consists of a curved, cantilevered steering arm, mounted on an untethered scratch drive actuator. These two components are […]