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RSSAll Entries Tagged With: "Micro Electromicanical Systems"

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Carbon MEMS Technology (C-MEMS)

Carbon-MEMS (C-MEMS) refers to a microfabrication technique in which photopatterned resists, heat treated (pyrolyzed) at different temperatures in different ambient gases, are used as a carbonaceous structural and functional material for micro electromechanical systems (MEMS). This new material permits an entire new variety of novel MEMS applications that employ structures having a wide variety of […]