All Entries Tagged With: "mems-robot"

An Untethered, Globally Controllable MEMS Micro-robot

We present a steerable, electrostatic, untethered, MEMS micro-robot, with dimensions of 60 µm by 250 µm by 10 µm. This micro-robot is 1 to 2 orders of magnitude smaller in size than previous micro-robotic systems. The device consists of a curved, cantilevered steering arm, mounted on an untethered scratch drive actuator. These two components are [...]