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MEMS-based clamp with a passive hold function for precision position retaining of micro manipulators

The goal was to design, model and fabricate a precision MEMS-based clamp with a relatively large clamping force. The purpose of the clamp is to mechanically fix a six degrees of freedom (DOFs) MEMS-based sample manipulator once the sample has been positioned in all DOFs. The clamping force is generated by a rotational electrostatic comb-drive […]