MEMSuniverse » lithography http://www.memsuniverse.com A Passion for Creativity & Innovation Tue, 23 Oct 2012 21:57:22 +0000 en-US hourly 1 http://wordpress.org/?v=3.4.2 2010-01-19 The first Comb-drive experiment in SUT Thailand (Winai Wanburee SUT-SLRI) http://www.memsuniverse.com/mems/2010-01-19-the-first-comb-drive-experiment-in-sut-thailand-winai-wanburee-sut-slri.html http://www.memsuniverse.com/mems/2010-01-19-the-first-comb-drive-experiment-in-sut-thailand-winai-wanburee-sut-slri.html#comments Mon, 15 Feb 2010 18:09:04 +0000 admin http://www.memsuniverse.com/?p=2272 This video shows the first comb-drive actuator experiment in Suranaree University of Technology, Thailand performed on Tuesday 19th January 2010. This electrostatically driven comb-drive actuator had 19 fingers of rotor with 30 microns width of each finger. It was fabricated by synchrotron x-ray lithography technique at micromachining lab, the Synchrotron Light Research Institute, Thailand by Winai Wanburee, a graduate student from the Suranaree University of Technology (Doctor of Philosophy, Electrical Engineering Program). The patterns was 300 micron-high. The fingers of stator was grounded and the fingers of rotor were biased with several level of DC voltage 1 Hz pulses.

For more information please contact Dr.Nimit Chomnawang , Email: sut.mems@gmail.com

Duration : 0:2:1


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]]> http://www.memsuniverse.com/mems/2010-01-19-the-first-comb-drive-experiment-in-sut-thailand-winai-wanburee-sut-slri.html/feed 1 SUSS MicroTec MA200Compact Mask Aligner http://www.memsuniverse.com/microfabrication/suss-microtec-ma200compact-mask-aligner.html http://www.memsuniverse.com/microfabrication/suss-microtec-ma200compact-mask-aligner.html#comments Sun, 14 Feb 2010 19:44:45 +0000 admin http://www.memsuniverse.com/?p=2269 The SUSS MA200Compact combines proven mask aligner technology with a variety of innovative features that make it the system of choice for thick resist MEMS applications (i.e. Inkjet Heads, accelerometers, HDD), Advanced Packaging (i.e. Electroplating Bump Process, RDL), Compound Semiconductor (i.e. HBLED) and Micro Optics (i.e. Wafer Level Camera)

Duration : 0:5:50


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]]> http://www.memsuniverse.com/microfabrication/suss-microtec-ma200compact-mask-aligner.html/feed 0 Neutronix-Quintel (NXQ) Company Presentation http://www.memsuniverse.com/microfluidics/neutronix-quintel-nxq-company-presentation.html http://www.memsuniverse.com/microfluidics/neutronix-quintel-nxq-company-presentation.html#comments Mon, 10 Nov 2008 22:36:13 +0000 admin http://www.memsuniverse.com/?p=836 Neutronix-Quintel (NXQ) – Manufacturing Contact/Proximity and Projection Mask Aligners for over 20 years. NXQ offers a full line of Automated Production, Research/Development and Custom systems.

Applications Include:

LED
OLED
Bio-Medical
MicroFluidics
Opto-electronic
Thin Film
MEMS
Packaging
Discrete semiconductor and more

Duration : 0:3:43


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]]> http://www.memsuniverse.com/microfluidics/neutronix-quintel-nxq-company-presentation.html/feed 0 Optofluidic maskless lithography http://www.memsuniverse.com/microfluidics/optofluidic-maskless-lithography.html http://www.memsuniverse.com/microfluidics/optofluidic-maskless-lithography.html#comments Sat, 06 Sep 2008 22:04:10 +0000 admin http://www.memsuniverse.com/?p=760 Applied Physics Letters, July 2007

Su Eun Chung, Wook Park, Hyunsung Park, Kyoungsik Yu, Namkyoo Park, Sunghoon Kwon

Optofluidic maskless lithography system for real-time synthesis of photopolymerized microstructures in microfluidic channels

Duration : 0:0:40


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