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Micro (and Nano) Mechanical Signal Processors

Tuesday, April 7th, 2009 @ 11:30 AM Sunil Bhave Location: White 411 With quality factors (Q) often exceeding 10,000, vibrating micromechanical resonators have emerged as leading candidates for on-chip versions of high-Q resonators used in wireless communication systems. However, as in the case for transistors, extending the frequency of MEMS resonators generally entails scaling of […]

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Materials Science of Silicon MEMS: A Two-Way Street

EECS 500 Arthur Heuer Friday, September 19th, 2008 MEMS-Micro Electro Mechanical Systems-add sensing and actuation, to the electronic functionality that is the hallmark of the semiconductor revolution. A majority of current commercial devices employ Si as the structural material to take advantage of the extensive Si technology developed for consumer and military devices. Duration : […]

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Controlled Microfluidic Interfaces for Microoptics and…

EECS Department Colloquium (EECS 500) Hongrui Jiang, Ph.D. “Controlled Microfluidic Interfaces for Microoptics and Microsensing” September 11, 2008 Lab on a chip has found many applications in biological and chemical analysis. Because these labs on chips involve handling of fluids at the microscale, surface tension profoundly affects the behavior and performance of these systems. Duration […]

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