MEMSuniverse » cwru http://www.memsuniverse.com A Passion for Creativity & Innovation Tue, 23 Oct 2012 21:57:22 +0000 en-US hourly 1 http://wordpress.org/?v=3.4.2 Materials Science of Silicon MEMS: A Two-Way Street http://www.memsuniverse.com/mems/materials-science-of-silicon-mems-a-two-way-street.html http://www.memsuniverse.com/mems/materials-science-of-silicon-mems-a-two-way-street.html#comments Fri, 21 Nov 2008 07:06:21 +0000 admin http://www.memsuniverse.com/?p=852 EECS 500
Arthur Heuer
Friday, September 19th, 2008
MEMS-Micro Electro Mechanical Systems-add sensing and actuation, to the electronic functionality that is the hallmark of the semiconductor revolution. A majority of current commercial devices employ Si as the structural material to take advantage of the extensive Si technology developed for consumer and military devices.

Duration : 1:2:17


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