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Materials Science of Silicon MEMS: A Two-Way Street

EECS 500 Arthur Heuer Friday, September 19th, 2008 MEMS-Micro Electro Mechanical Systems-add sensing and actuation, to the electronic functionality that is the hallmark of the semiconductor revolution. A majority of current commercial devices employ Si as the structural material to take advantage of the extensive Si technology developed for consumer and military devices. Duration : [...]