MEMSuniverse » Thermal Actuator http://www.memsuniverse.com A Passion for Creativity & Innovation Tue, 23 Oct 2012 21:57:22 +0000 en-US hourly 1 http://wordpress.org/?v=3.4.2 Thermal Actuation for Precision Micro Motion and Positioning http://www.memsuniverse.com/mems/thermal-actuation-for-precision-micro-motion-and-positioning.html http://www.memsuniverse.com/mems/thermal-actuation-for-precision-micro-motion-and-positioning.html#comments Wed, 05 May 2010 10:43:18 +0000 admin http://www.memsuniverse.com/mems/thermal-actuation-for-precision-micro-motion-and-positioning.html Demonstrator of a MEMS thermal actuator for improving the tracking accuracy of a hard disk drive head. This micro system was develop at the Delft University of Technology, in cooperation with DIMES (Delft Institute of Microsystems and Nanoelectronics), as part of the STW project 07213 ‘Advanced silicon micromachining for integrated 3D mechatronic microsystems’.

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