MEMSuniverse » Larger http://www.memsuniverse.com A Passion for Creativity & Innovation Tue, 23 Oct 2012 21:57:22 +0000 en-US hourly 1 http://wordpress.org/?v=3.4.2 Larger MEMS Micromirrors in Operation http://www.memsuniverse.com/mems/larger-mems-micromirrors-in-operation.html http://www.memsuniverse.com/mems/larger-mems-micromirrors-in-operation.html#comments Mon, 23 Mar 2009 07:23:16 +0000 admin http://www.memsuniverse.com/?p=1267 Large Micromirrors – Latest actuators from ARIMEMS7 generation of devices provide bi-directional two-axis scanning. Largest mirrors to date in the 2mm diameter and the 3mm diameter range are mounted on the actuators and demonstrated. To date, most generations of ARIMEMS micromirror devices provided 1-quadrant (uni-directional) scanning in two-axes, eg from 0° to 8° on each axis. In other words, mirror scans a laser beam only in one quadrant of the hemisphere above the chip. Most recent …

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