MEMSuniverse » 2 http://www.memsuniverse.com A Passion for Creativity & Innovation Tue, 23 Oct 2012 21:57:22 +0000 en-US hourly 1 http://wordpress.org/?v=3.4.2 Polytec, Inc Measuring 3-D Dynamics and Topography of Microstructure – The System http://www.memsuniverse.com/mems/polytec-inc-measuring-3-d-dynamics-and-topography-of-microstructure-the-system.html http://www.memsuniverse.com/mems/polytec-inc-measuring-3-d-dynamics-and-topography-of-microstructure-the-system.html#comments Thu, 05 Mar 2009 06:17:56 +0000 admin http://www.memsuniverse.com/?p=1164 The MSA-500 Micro System Analyzer is a powerful new all-in-one measurement workstation for precise 3-D dynamic characterization of MEMS and MOEMS microstructures. * Characterize out-of-plane vibrations by Scanning Laser-Doppler Vibrometry * Measure in-plane motion and vibration by Stroboscopic Video Microscopy * Determine surface topography by White Light Interferometry * Test wafers and individual die by combining Polytecs MSA-500 with a MEMS probe station

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