Inspired by the growing variety of Micro-Electro-Mechanical-Systems (MEMS), Polytec presents a new line of microscope systems for measurements of MEMS dynamics and topography.
The MSA-500 Micro System Analyzer is a powerful new all-in-one measurement workstation for precise 3-D dynamic characterization of MEMS and MOEMS microstructures.
* Characterize out-of-plane vibrations by Scanning Laser-Doppler Vibrometry
* Measure in-plane motion and vibration by Stroboscopic Video Microscopy
* Determine surface topography by White Light Interferometry
* Test wafers and individual die by combining Polytecs MSA-500 with a MEMS probe station
Duration : 0:7:32
Filed Under: MEMS
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