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Polytec, Inc Measuring 3-D Dynamics and Topography of Microstructure – The System

The MSA-500 Micro System Analyzer is a powerful new all-in-one measurement workstation for precise 3-D dynamic characterization of MEMS and MOEMS microstructures. * Characterize out-of-plane vibrations by Scanning Laser-Doppler Vibrometry * Measure in-plane motion and vibration by Stroboscopic Video Microscopy * Determine surface topography by White Light Interferometry * Test wafers and individual die by combining Polytecs MSA-500 with a MEMS probe station

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