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Larger MEMS Micromirrors in Operation

Large Micromirrors – Latest actuators from ARIMEMS7 generation of devices provide bi-directional two-axis scanning. Largest mirrors to date in the 2mm diameter and the 3mm diameter range are mounted on the actuators and demonstrated. To date, most generations of ARIMEMS micromirror devices provided 1-quadrant (uni-directional) scanning in two-axes, eg from 0° to 8° on each axis. In other words, mirror scans a laser beam only in one quadrant of the hemisphere above the chip. Most recent …

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