This video shows the first comb-drive actuator experiment in Suranaree University of Technology, Thailand performed on Tuesday 19th January 2010. This electrostatically driven comb-drive actuator had 19 fingers of rotor with 30 microns width of each finger. It was fabricated by synchrotron x-ray lithography technique at micromachining lab, the Synchrotron Light Research Institute, Thailand by Winai Wanburee, a graduate student from the Suranaree University of Technology (Doctor of Philosophy, Electrical Engineering Program). The patterns was 300 micron-high. The fingers of stator was grounded and the fingers of rotor were biased with several level of DC voltage 1 Hz pulses.
For more information please contact Dr.Nimit Chomnawang , Email: email@example.com
Duration : 0:2:1
Filed Under: MEMS
About the Author: