I’m interested in knowing opinions of which approach is superior for MEMS-based inertial sensors – capacitive or thermal (Memsic’s approach)
Each approach has it’s advantages:
-Capacitive has bigger bandwidth
-Thermal is more resistant to shock and vibration. However, it works only within a small inclination angles (+-60deg)
Which one to choose depends on the application.
By the way, I’d like to invite your question to a specialized yahoo group dedicated to sensors: http://tech.groups.yahoo.com/group/sensorforum . There’s a good number of sensor experts. It will be interesting to see what they will say about thermal accelerometers vs. capacitive ones.
Filed Under: MEMS Help
About the Author: