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For MEMS-based inertial sensors, which approach is superior – capacitave or thermal?

I’m interested in knowing opinions of which approach is superior for MEMS-based inertial sensors – capacitive or thermal (Memsic’s approach)

Each approach has it’s advantages:
-Capacitive has bigger bandwidth
-Thermal is more resistant to shock and vibration. However, it works only within a small inclination angles (+-60deg)

Which one to choose depends on the application.

By the way, I’d like to invite your question to a specialized yahoo group dedicated to sensors: http://tech.groups.yahoo.com/group/sensorforum . There’s a good number of sensor experts. It will be interesting to see what they will say about thermal accelerometers vs. capacitive ones.

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  1. Nikolai A says:

    Each approach has it’s advantages:
    -Capacitive has bigger bandwidth
    -Thermal is more resistant to shock and vibration. However, it works only within a small inclination angles (+-60deg)

    Which one to choose depends on the application.

    By the way, I’d like to invite your question to a specialized yahoo group dedicated to sensors: http://tech.groups.yahoo.com/group/sensorforum . There’s a good number of sensor experts. It will be interesting to see what they will say about thermal accelerometers vs. capacitive ones.
    References :

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