All Entries in the "MEMS" Category
Micro Electro Mechanical Systems
Film project for ELEC457 Duration : 0:4:27
Vision-based Microassembly of 3D Solid and Complex MEMS
The video shows an automatic assembly of fives silicon microparts of 400 µm x 400 µm x 100 µm on 3-levels. Each microassembly subtask is performed using a pose-based visual control which uses a CAD model-based tracker. The assembly clearance is estimated to 3 µm that allows to obtain solid and complex micro electromechanical structures [...]
Thermal Actuation for Precision Micro Motion and Positioning
Demonstrator of a MEMS thermal actuator for improving the tracking accuracy of a hard disk drive head. This micro system was develop at the Delft University of Technology, in cooperation with DIMES (Delft Institute of Microsystems and Nanoelectronics), as part of the STW project 07213 ‘Advanced silicon micromachining for integrated 3D mechatronic microsystems’. Duration : [...]
Handheld, multi-axis camera stabilization device utilizing MEMS gyro sensors
Handheld, multi-axis camera stabilization device utilizing MEMS gyro sensors (U.S. Patent 7,642,741, additional patent pending) In the field of motion picture photography, camera stabilization devices are used to isolate the camera from the natural body movements of the operator, while providing fluid maneuverability across a set. The purpose of this project is to design, build and optimize [...]
MEMS-based clamp with a passive hold function for precision position retaining of micro manipulators
The goal was to design, model and fabricate a precision MEMS-based clamp with a relatively large clamping force. The purpose of the clamp is to mechanically fix a six degrees of freedom (DOFs) MEMS-based sample manipulator once the sample has been positioned in all DOFs. The clamping force is generated by a rotational electrostatic comb-drive [...]
optomechanical resonator
Optomechanical GHz Oscillator and Spectroscopy. Just like the spectral signature of materials originates from molecular vibrations, photonic devices have many spectral lines originating from their different mechanical modes. Our group has excited these modes using the radiation pressure produced by light circulating within the device (1, 2, 3) which oscillate regeneratively at controllable mechanical eigen-frequencies [...]
2010-01-19 The first Comb-drive experiment in SUT Thailand (Winai Wanburee SUT-SLRI)
This video shows the first comb-drive actuator experiment in Suranaree University of Technology, Thailand performed on Tuesday 19th January 2010. This electrostatically driven comb-drive actuator had 19 fingers of rotor with 30 microns width of each finger. It was fabricated by synchrotron x-ray lithography technique at micromachining lab, the Synchrotron Light Research Institute, Thailand by [...]
MEMS Heatuator
The joint lecture about an introduction to MEMS, which was developed by Dr. Osamu Tabata at Kyoto University and Dr. Man Wong at Hong Kong University of Science and Technology (HKUST), has been also held in this year as a part of an educational program entitled “Micro Electro Mechanical System Creation” for the master course [...]
Electroactive Polymer Artificial Muscle (EPAM) Spring Roll Actuator
Electroactive Polymer Artificial Muscle (EPAM) Spring Roll Actuator developed by SRI International. Learn more at Hizook.com — http://www.hizook.com/blog/2009/12/28/electroactive-polymers-eap-artificial-muscles-epam-robot-applications Duration : 0:0:24
Nano- and Micro-systems that help people
The Miki Lab is developing machines that help people based on entirely new concepts, using microscopic structures of micrometer and nanometer sizes. The Lab is utilizing a diverse range of nano- and micro-manufacturing technologies, with the aim of innovations in human interfaces, healthcare, the environment, and energy. [Human Interfaces] Q.For example, someone who cant get [...]